Physics | Engineering internship: electron optical sensitivity simulations

Introduction

At ASML’s Delft office, we are developing a multi-beam electron microscope for inspecting semiconductor wafers during production. A key component of this system is a micro-electromechanical (MEMS) module, which helps shape and direct the electron beams. Just as small imperfections in lenses or mounts can affect the performance of an optical system, manufacturing tolerances in the MEMS module can influence the behavior of the electron optics. Understanding how these tolerances affect system performance is essential for robust design.
 

Your assignment

You, as an intern, will collaborate with our design team to investigate how manufacturing variations, such as small displacements or geometrical imperfections, impact the performance of the MEMS module.
 

Key responsibilities include (not limited to):