Senior/ Lead Research Engineer (FAB), Implant / RTA Process, IME
A*STARJob Description
Implant / RTA Process Engineer ? R&D
The Implant / RTA Process Engineer is responsible for sustaining daily operations, ensuring stable tool performance, and maintaining high process reliability for ion implantation, rapid thermal annealing (RTA), and related thermal processes. This role emphasizes equipment health monitoring, preventive maintenance leadership, recipe integrity, process recovery, and rapid issue resolution. Familiarity with Epitaxy (Epi) processes is advantageous for broader device and material stack considerations. AI- and data-driven techniques are used to predict drifts, shorten downtime, and enhance process robustness.
Key Responsibilities:
Data Analytics & Process Control
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